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型號

型號-流量

技術參數

貨號

DUO18LCMS

DUO18LCMS-32/50

兩路氣體：ZERO AIR+N2                    Gas1 : 50 Nl/min ZERO AIR
Gas2 : 32 Nl/min N2                  Gas1/Gas2 : dew point< -60°C
Gas2 : >99% N2

75-7302

TRIO18LCMS

TRIO18LCMS-24/12/8

三路氣體：          

Gas1-Source gas : 24 Nl/min ZERO AIR，<0.1ppm HC, phthalates and suspended liquid free      
Gas2-Curtain Gas :12 Nl/min N2， >99.5% N2, <0.1ppm HC, phthalates and suspended liquid free         
Gas3-Exhaust Gas : 8 Nl/min dry AIR，dry compressed Air 

75-7202

FIDSTATION LC or RC

FIDSTATION RC-160/2000

兩路氣體H2和零級空氣：

純度：H2>99.999%, Air<400ppm.  流量：70ml/minH2和500ml/min Air。        其他類推

72-2210

FIDSTATION RC-250/3000

72-2213

FIDSTATION LC-70/500

FIDSTATION LC-100/1000

73-2211

FIDSTATION LC-160/2000

FIDSTATION LC-250/3000

FIDSTATION LC-500/6000

73-2213

FIDSTATION ULTRA or RC

FIDSTATION ULTRA RC-160/2000

>99.9999% (maximum HC content : 0.05ppm), Dew point -75°C             160 Nml/ min H2 & 2000 Nml/min AIR

72-2192

FIDSTATION ULTRA RC-250/3000

72-2193

FIDSTATION ULTRA LC-160/2000

73-2291

FIDSTATION ULTRA LC-250/3000

73-2293

GCSTATION LC or RC

GCSTATION RC-70/700/70

提供三路氣體H2-AIR-N2：70 Nml/ min H2 & 700 Nml/min AIR & 70 Nml/min N2，    H2>99.999% (maximum HC content : 0.05ppm )，                             AIR< 400ppm H2O (<-30°C DP / -28°F DP)， N2 > 99.999%, < -60°C dew point, < 10ppm O2, particulates <0.1μm

72-3210

GCSTATION RC-160/2000/160

72-3212

GCSTATION RC-250/3000/250

72-3213

GCSTATION LC-70/700/70

GCSTATION LC-100/1000/100

74-3201

GCSTATION LC-160/1500/160

74-3203

GCSTATION LC-250/3000/250

74-3204

GCSTATION ULTRA LC

GCSTATION ULTRA RC-70/700/70

提供三路氣體H2-AIR-N2：

70 Nml/ min H2 & 700 Nml/min AIR & 70 Nml/min N2          H2>99.9999% (maximum HC content : 0.05ppm),

Dew point -75°C       

AIR< 10ppm H2O (<-60°C DP); < 50 ppb HC ; < 50 ppb CO and CH4; Particulates <0.1μm   N2> 99.9999% ; < -75°C dew point, < 1 ppm H2O, particulates <0.1μm; <0.05ppm HC-CH4

72-3290

GCSTATION ULTRA RC-160/2000/160

72-3292

GCSTATION ULTRA RC-250/3000/250

72-3293

GCSTAITON ULTRA LC-100/1000/100

74-3292

GCSTAITON ULTRA LC-160/1500/160

74-3293

GCSTAITON ULTRA LC-250/3000/250

74-3294

GCSTATION XL

GCSTATION XL LC-xxxx/xxxx/xxxx

提供三路氣體H2-AIR-N2：

1000/5000/1000：

300 Nml/ min H2 & 3000 Nml/min AIR & 2500 Nml/min N2  

H2>99.999% (maximum HC content : 0.05ppm )， 

AIR < 400ppm H2O (<-30°C DP / -28°F DP) ; if option Methan (CH4) Scrubber then < 50 ppb HC ; < 50 ppb CO and CH4; Particulates <0.1μm    N2> 99.999% N2, < -60°C dew point, < 10ppm O2, particulates <0.1μm

74-3210

PIDSTATATION LC or RC

PIDSTATION RC-160/1500

提供兩路氣體N2+AIR：PIDSTATION50LC-250/2000 :

250 Nml/ min N2 & 2000 Nml/min AIR，N2> 99.999% N2, < -60°C dew point, < 10ppm O2, particulates <0.1μm     AIR< 400ppm H2O (<-30°C DP / -28°F DP),

72-7201

PIDSTATION LC-250/3000

74-7202

PIDSTATATION ULTRA LC or RC

PIDSTATION ULTRA RC-160/1500

PIDSTATION ULTRA LC-250/2000 : 160 Nml/ min N2 & 1500 Nml/min AIR        

H2> 99.9999% ; < -75°C dew point, < 1 ppm H2O, particulates <0.1μm; <0.05ppm HC-CH4      

AIR< 10ppm H2O (<-60°C DP); < 50 ppb HC ; < 50 ppb CO and CH4; Particulates <0.1μm

72-7301

PIDSTATION ULTRA LC-250/3000

74-7301

H2-N2 STATION LC or RC

H2-N2STATION RC-160/500

H2-N2 STATIONLC-250/1000 : 250 Nml/ min N2 & 1000 Nml/min N2   H2>99.999% (maximum HC content : 0.05ppm )   N2>99.999%, < -60°C dew point, < 10ppm O2, particulates <0.1μm

72-7501

H2-N2STATION LC-250/1000

74-7501

H2-N2 STATION ULTRA LC

H2-N2STATION ULTRA RC-160/500

H2-N2 STATION ULTRA LC-250/1000 : 250 Nml/ min N2 & 1000 Nml/min N2  H2>99.9999% (maximum HC content : 0.05ppm), Dew point -75°C       N2> 99.9999% ; < -75°C dew point, < 1 ppm H2O, particulates <0.1μm; <0.05ppm HC-CH4

72-7601

H2-N2STATION ULTRA LC-250/1000

74-7601